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The typical electricity in the NIR laser nonetheless has the opportunity being improved to tens of watts including 70 W [26] if the double-move configuration might be used for your Yb:YAG SCF amplifier phase. For this reason, In the event the conversion performance of 31% from NIR to DUV may very well be still preserved at this better energy ailment, the typical output electric power of the DUV laser at 258 nm could possibly be in excess of twenty W, which might become a amazing power level for your DUV laser and bring about the unanticipated DUV laser machining benefits. Additionally, for prime-electricity DUV laser, the UV hurt from the nonlinear crystal, such as the Home windows for CLBO crystal and also the mirrors, is another essential parameter for long term and secure operation.
On the flip side, the beam high quality of the higher electricity DUV laser would become worse resulting from much more critical thermal and nonlinear consequences. Hence, the frequency conversion processes must be thoroughly meant to mitigate the aforementioned effects. Therefore, a large-electrical power DUV laser at the FHG of 1 μm with a superb beam top quality may be acquired and will be beneficial for getting the shorter wavelength DUV lasers which include 193 nm by SFG.
Both of those the 1040 nm and 1078 nm laser originate from a single dual-wavelength Yb-doped fiber laser. Each laser is amplified by phases of fiber amplifier and Yb-doped components amplifier, respectively.
On the other facet, the ability scaling on the NIR laser is another aspect to enhance the regular electrical power of your 193-nm DUV laser. Mainly because of the deficiency of the higher-ability amplification Remedy of the NIR laser (one example is at 1553 nm), nonlinear frequency processes for example optical parameter oscillation (OPO) could be applied to produce a wavelength converter by shifting the wavelength from 1 μm to the desired wavelength together with getting relative bigger electrical power [21]. Not long ago, a diamond Raman laser confirmed its capability in acquiring a large electricity in addition to a high conversion efficiency in the 1st Stokes from the 1-μm laser [22,23], which implies the possibility to generally be used in the 193-nm DUV laser era as a consequence of its large Raman attain and enormous frequency change.
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In check here addition, combining the good-state laser with other nonlinear course of action like stimulated Raman scattering, NIR lasers may be obtained at new wavelengths with higher electricity and superior beam quality, which was tested through the proof-of-theory experiment. This Raman laser scheme gives a whole new route to the large-electrical power DUV laser, especially in the wavelength of 193 nm.
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The conversion performance from essential NIR to DUV is from five% to 36% based on the reported leads to Desk 1. Raising the conversion efficiency will decrease the stress on the design and setup of the basic laser amplifier along with the electrical power intake. An excellent beam excellent of the elemental laser may also add to the growing in the conversion effectiveness together with the appropriate electric power depth with the NIR and environmentally friendly laser in the SHG and FHG procedure, respectively. The highest conversion efficiencies from NIR to green and green to DUV laser by use of CLBO crystal are 70% and all-around fifty%, respectively [12], which corresponds for the conversion efficiency of 35% from essential to DUV.
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